PanRCWA (Rigorous Coupled Wave Analysis)

  • Simulation time O(L*n^3) where L is the number of layers (not including the uniform layers of the EUV multilayer mirror) and n is the number of retained "orders"
  • Very fast for very small domains
  • Can have very fine resolution in the x & y directions
  • Accurately model thin films as there is no "grid snapping" in the Z-direction
  • See RCWA vs FDTD

RCWA Demo Video