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Main Products

Options to HyperLith (Main GUI for Mask-in-Stepper simulations)

  • Rigorous EMF (TEMPESTpr2 FDTD + RCWA + QuasiRig)
  • Resist
  • Gazillion (GDS/OASIS layouts)
  • SOAPI (Java/MATLAB/Python/Octave programming interface)
  • SimRunner/PSS (Parallel processing/distributed computing)
  • HSS (NVIDIA GPU hardware acceleration)
  • ARMI (PanTune+UWRM)
  • PanOPC (small area OPC)
  • PanSO (free form source optimizer)
  • Advanced EUV Mask Models (PEUV, QEUV, QRCWA)

Options to EM-Suite (main GUI for general EM simulations)

  • Rigorous EMF (TEMPESTpr2 FDTD + RCWA)
  • Resist
  • Gazillion (GDS/OASIS layouts)
  • SOAPI (Java/MATLAB/Python/Octave programming interface)
  • SimRunner/PSS (Parallel processing/distributed computing)
  • HSS (NVIDIA GPU hardware acceleration)
  • ARMI (PanTune+UWRM)
  • PanOPC (small area OPC)
  • PanSO (free form source optimizer)
  • Advanced EUV Mask Models (PEUV, QEUV, QRCWA)


KeyServer

-network license option

Stack

-main GUI for film stack analysis

-included for free with EM-Suite or HyperLith

-an accessory program

 

MatMan

-GUI for managing material database

-included for free with EM-Suite or HyperLith

-an accessory program

 

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