panoramictech.com

  • SEM Image Analysis
  • Available as stand-alone tool and/or works with HyperLith
  • Measure both simulated and real SEM images
  • Allows "apples-to-apples" comparison of CD
  • Generate CD and LER Bossungs (with fitting)
  • Local CD uniformity (LCDU)
  • See video!
  • See presentation!
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