TRIG is a new fast, rigorous, accurate, 3D Maxwell solver for EUV and DUV

• Particularly fast for rigorous EUV (20X faster than FDTD+FBC)
• Faster for DUV (~2X to 5X)
• See presentation on TRIG for EUV
• See presentation on TRIG for DUV
• See detailed performance benchmark (DUV)
• See 50X speed-up for rigorous EUV video