- Rigorous OPC and Source Optimization (presentation)
- Embedded Multilayer Mirror Defects (download a recent presentation)
- Arbitrary Defect Geometry (video)
- Inspect-ability
- Print-ability
- Off-axis Shadowing Effects, H-V bias (including Non-Constant Scattering Coefficients)
- Absorber Stack Analysis (EM-Stack video)
- Absorber Profile (sidewall & corner rounding) (video)
- Absorber Defects
- OPC for EUV (small area)
- Multilayer Mirror Structure (PSM)