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EUV

  • Rigorous OPC and Source Optimization (presentation)
  • Embedded Multilayer Mirror Defects (download a recent presentation)
    • Arbitrary Defect Geometry (video)
    • Inspect-ability
    • Print-ability
  • Off-axis Shadowing Effects, H-V bias (including Non-Constant Scattering Coefficients)
  • Absorber Stack Analysis (EM-Stack video)
  • Absorber Profile (sidewall & corner rounding) (video)
  • Absorber Defects
  • OPC for EUV (small area)
  • Multilayer Mirror Structure (PSM)
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