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ArF/Immersion
Rigorous mask modeling
Rigorous OPC & Source Optimization
(presentation)
Laser Spectral Bandwidth Effects (video,
presentation
)
polarization effects
immersion bubble
double exposure
wafer topography
(presentation)
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Home
Products
HyperLith
TEMPESTpr2
Rigorous
Resist
Gazillion
PanSEM
PanOPC & PanSO
PEUV + QEUV
HyperLith
SOAPI
FullChip
EM-Suite
TEMPESTpr2 (2)
Resist
EM-Suite
SimRunner
HSS (GPU Acceleration)
PSS
Licensing
Indefinite License Extension
KeyServer
Applications
Support
Hynix Downloads
Company
Contact
support@panoramictech.com