The easy-to-use HyperLithTM simulator is also very powerful. Watch our demo videos to see just how easy-to-use it is:

Contact us for a live online or in-person demonstration of our latest release

Key Features

  • Very easy to use yet still flexible and powerful
  • Choose from a selection of pre-defined mask technologies, patterns and resist models customize a pre-defined technology or pattern, or create your own from scratch
  • Simplified graphical user interface is oriented specifically towards mask-in-stepper lithography simulations
  • LiveView GUI allows user to see an approximate simulation results for the nominal case
  • Works with SimRunner (distributed computing and hardware-acceleration)
  • DUV, Immersion, EUV, Rigorous/Scalar, Polarization, Aberrations, Resist Capable
  • Can export a .sim file for EM-Suite
  • 32/64 bit Windows/Linux

HyperLith Screen Shots

HyperLith animation