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  • Includes FDTD (TEMPESTpr2), RCWA and QuasiRig(TM)
  • Rigorous modeling of mask scattering (FDTD, RCWA)
  • Fast quasi-rigorous modeling of mask scattering (QuasiRig)
  • Rigorous modeling of wafer topography  (FDTD)


  • Distributed computing with SimRunner
  • NVIDIA GPU Hardware Acceleration Available
  • Fourier Boundary Condition (FBC) for fast, accurate EUV mask modeling


  • 2D and 3D implementation
  • fast for small domains
  • very accurate